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Diaphragm Valve×KITZ SCT Corporation - List of Manufacturers, Suppliers, Companies and Products

Diaphragm Valve Product List

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High-pressure compatible high-purity gas diaphragm valve "NRD Series"

Adoption of a springless diaphragm structure reduces particles! We have a lineup of high-flow types.

The "NRD Series" is a high-pressure diaphragm valve that adopts a new high-output actuator and an internal screw body structure, pursuing a simple and compact design. As a valve that can handle high pressure, it offers a wide range of flow rates from low to high flow types. The entire series features a springless diaphragm structure, reducing particles. 【Features】 ■ Slim and compact design ■ Lineup of high-flow types ■ Adoption of springless diaphragm structure ■ Compatible with high-pressure gas minister certification (optional) ■ Special specifications and block valve compatibility (optional) *KITZ SCT offers various proposals for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

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High-pressure compatible automatic diaphragm valve 'NRHD8C Series'

Optimal for high flow supply systems! A high-pressure automatic valve that achieves safety, high durability, and particle-free performance.

The "NRHD8C Series" is a Cv1.0 high-flow type automatic valve. #Pneumatic By adopting a newly developed high-output actuator and a springless diaphragm structure, it achieves safety, high durability, and particle-free operation. It is suitable for high-flow supply systems in flat panel display factories and semiconductor factories for large-diameter wafers. 【Features】 ■ Cv1.0 high-flow type ■ Achieves safety, high durability, and particle-free operation by adopting a newly developed high-output actuator and a springless diaphragm structure ■ Suitable for high-flow supply systems in flat panel display factories and semiconductor factories for large-diameter wafers *KITZ SCT offers various proposals for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

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High-pressure compatible automatic diaphragm valve 'NRMD8C Series'

Achieving safety, high durability, and particle-free performance! A high-pressure compatible automatic valve with a slimmed-down actuator.

The "NRMD8C Series" is an automatic valve of the Cv0.75 medium flow type. #Pneumatic It features a slim actuator designed for high-pressure gas equipment such as BSGS (special material gas supply equipment) and GS. By adopting a newly developed high-output actuator and a springless diaphragm structure, it achieves safety, high durability, and particle-free operation. 【Features】 ■ Cv0.75 medium flow type ■ Slim actuator designed for high-pressure gas equipment such as BSGS and GS ■ Achieves safety, high durability, and particle-free operation by adopting a newly developed high-output actuator and springless diaphragm structure ※KITZ SCT offers various proposals for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF document or feel free to contact us.

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High Purity Gas Series Compact Diaphragm Valve 'VLCD Series'

Inherits the basic performance of the "KD series" and achieves a 20% reduction in size! Usable for manufacturing equipment for semiconductors, FPD, LEDs, etc.!

The "VLCD Series" is a diaphragm valve that inherits the basic performance of the conventional "KD Series" while implementing commonality of parts. By reviewing each component and material, we have achieved a low-cost price. The cleaning and inspection processes are equivalent to those of the conventional products, making it suitable for use in manufacturing equipment for semiconductors, FPDs, and LEDs. 【Features】 ■ Implements commonality of parts while inheriting the performance of the conventional "KD Series" ■ Achieves a 20% reduction in external dimensions compared to the conventional "KD Series" ■ Reviews of each component and material have been conducted to achieve a low-cost price ■ Usable in manufacturing equipment for semiconductors, FPDs, and LEDs #Pneumatics *For more details, please refer to the PDF materials or feel free to contact us.

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High-pressure compatible high-purity gas diaphragm valve "VRD Series"

For high-pressure gas lines and internal piping in semiconductor manufacturing processes! The height of all sizes has been reduced by 6mm compared to conventional products, making them more compact.

The "VRD Series" is a 1/4" high-pressure direct diaphragm valve that supports an enclosed gas pressure of 20.6 MPa. Maintaining the same performance as the conventional "RD Series," it reduces the number of components to achieve a lower price. The height of all sizes has been shortened by 6 mm compared to the conventional model, making it more compact. It can be used in gas lines and piping within equipment where complete prevention of high pressure and high vacuum retention, as well as leakage to the outside air, is desired. 【Features】 ■ Supports enclosed gas pressure of 20.6 MPa ■ Achieves a lower price by reducing the number of components while maintaining the same performance as the conventional model ■ Reduces operating torque compared to the "RD Series" ■ The height of all sizes has been shortened by 6 mm compared to the conventional model, making it more compact ■ Easier to use than ever due to low torque and compact design *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

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High-purity gas diaphragm valve "Quick Turn Valve"

A valve developed to prevent erroneous operation due to human error, which has no intermediate position and always maintains either an "OPEN" or "CLOSE" state.

We would like to introduce the "Quick Turn Valve," a high-purity gas valve for semiconductor manufacturing handled by KITZ SCT Corporation. We offer a diverse lineup, including the connection fitting "KD4QTS-VC" with 1/4" CVC male, as well as "KD8QTS-VC," "KD4QTS-VFC," and "KD8QTS-VFC." The valve has no intermediate opening and always maintains either an "OPEN" or "CLOSE" state, helping to prevent human error that could lead to incorrect valve operation, such as the valve being partially open. 【Features】 ■ Improved operability with a butterfly handle ■ No intermediate opening, always maintains either "OPEN" or "CLOSE" state ■ Helps prevent the valve from being partially open *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

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High-purity liquid gas diaphragm valve "WD"

Capable of handling high-purity liquid materials for semiconductor manufacturing! A valve with high-performance characteristics of a diaphragm valve!

The "WD" is a diaphragm valve that can use high-purity liquid materials such as TEOS, which are used in semiconductors and LCD devices, as fluids. While maintaining the basic characteristics of the valve, particle performance, and purge characteristics, it allows for the replacement of the seat (ASSY) component on the user side. Additionally, it has an actuator diameter of φ39.7mm and is compatible with a line pitch of 40mm. 【Features】 ■ Can use high-purity liquid materials such as TEOS, which are used in semiconductors and LCD devices, as fluids ■ Allows for the replacement of the seat (ASSY) component on the user side while maintaining purge characteristics and other features ■ Effective in improving maintenance performance and reducing running costs for sealing valves of material containers ■ The seat (ASSY) replacement tool is common with the "WD4 manual valve series" ■ Compatible with a line pitch of 40mm with an actuator diameter of φ39.7mm *For more details, please refer to the PDF document or feel free to contact us.

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  • Pipe Fittings

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Case Study: Safety Measures for Gas Supply Line Valves *Currently Available for Free*

"Complete Case Study of Flow Paths" For those with near-miss incidents due to partially open valves and those struggling with closure confirmation in confined spaces, this is a must-see! We are currently offering examples of safety measures.

Are you facing issues such as thinking you have closed the valve when it is actually in a partially open state, or that confirming the valve closure and performing tasks takes time and effort? KITZ SCT offers various solutions for fluid-related concerns in semiconductor manufacturing. If you have any specific cases you are interested in, please contact us via Ipros or through our company website. Website: https://www.kitzsct.com/contact/product/?utm_source=Ipros&utm_medium=web&utm_campaign=Arbooth

  • CVD Equipment
  • Oxidation/Diffusion Device
  • Other semiconductor manufacturing equipment

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High-temperature resistant diaphragm valves "ZD Series" "ZD-K Series"

The high-purity gas series valves, ZD series and ZD-K series, are diaphragm valves that allow for detachable and replaceable seat components and can be used in high-temperature environments.

The high-purity gas valve series ZD and ZD-K (high-temperature replaceable valve) are diaphragm valves that allow for detachable and replaceable seat components and can be used in high-temperature environments. Customers can replace the valve seat themselves! - Suitable for applications such as cleaning and replacing valves for material containers. * Note: After maintenance, the product warranty will be void. - Usable in high-temperature environments! ZD series: up to 200°C, ZD-K series: up to 250°C. 【Features】 ■ Size: 1/4" 1/2" ■ Drive method: Automatic Manual (only ZD-K) KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF document or feel free to contact us.

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High-temperature compatible diaphragm valve with detachable PFA sheet section.

High-purity gas valves suitable for material containers and semiconductor manufacturing processes. The seat can be detached and replaced, and it can be used in high-temperature environments up to 250 degrees.

The high-purity gas valve series "ZD Series" and "ZD-K Series" (high-temperature replaceable valves) are diaphragm valves that allow for the detachable and replaceable exchange of the seat section and can be used in high-temperature environments. 【Features】 ■ Customers can replace the valve seat themselves! The seat section can be detached and replaced during valve cleaning, allowing for the reuse of the valve. This makes it suitable for applications where valves need to be cleaned or replaced, such as for material containers. *Note: After maintenance, the product warranty will be void. ■ Usable in high-temperature environments! Both the interior through which the fluid flows and the exterior are resistant to high-temperature environments. The "ZD Series" can be used in environments up to 200°C, while the "ZD-K Series" can be used in environments up to 250°C. ■ Improved durability through the adoption of PFA seats By changing from metal seats to PFA seats, durability performance is improved by approximately 16 times.* *Based on our performance comparison data. *Metal seat: 50,000 cycles, ZD-K Series PFA seat: 800,000 cycles. We offer various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF document or feel free to contact us.

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High Purity Gas Series Compact Diaphragm Valve 'KCD Series'

Achieving further compactness based on the "KD series"! The basic performance inherits all the high specifications of the "KD series."

The "KCD Series" is a direct diaphragm valve that aims for further compactness based on the "KD Series." Without compromising durability, it achieves 4 million cycles for automatic valves and 100,000 cycles for manual valves. With the highest level of manufacturing environment and internal polishing treatment, it accommodates many high-purity gases for semiconductors and pursues particle performance to the utmost limit. 【Features】 ■ Successfully reduced the volume from 1.2 cm³ in the KD Series to 0.97 cm³ ■ Limited to 1/4" size while maintaining the same design as the KD Series, reducing the external size by approximately 20% and also lightweight ■ Achieves 4 million cycles for automatic valves and 100,000 cycles for manual valves without compromising durability ■ Accommodates many high-purity gases for semiconductors and pursues particle performance to the utmost limit #Pneumatics *For more details, please refer to the PDF document or feel free to contact us.

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High Purity Gas Diaphragm Valve "KD Series"

High-purity gases for semiconductor manufacturing processes! Pursuing extreme levels of sealing performance, durability, degassing performance, and corrosion resistance.

The "KD Series" is a highly reliable valve that achieves a high Cv value, is compatible with high-purity gases for semiconductors, and combines high durability with excellent corrosion resistance. By minimizing the vertical hole dimensions of the body and reducing the internal volume to 1.36 cm³, it realizes outstanding gas replacement characteristics. With the highest level of manufacturing environment and internal polishing treatment, it is designed to accommodate high-purity gases for semiconductors and pursues particle performance to the utmost limit. 【Features】 ■ Achieves excellent gas replacement characteristics by reducing the internal volume to 1.36 cm³ ■ Pursues high sealing performance, high durability, degassing performance, and corrosion resistance to the utmost limit ■ High corrosion resistance through carefully selected diaphragm materials and unique molding methods that eliminate individual differences to achieve high durability ■ Accommodates high-purity gases for semiconductors and pursues particle performance to the utmost limit #Pneumatics *KITZ SCT offers various proposals for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

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High-pressure gas compatible high-purity gas diaphragm valve "RD Series"

We have achieved compact design and low torque for our high-pressure diaphragm valve! Manual and automatic valves are available!

The "RD Series" is a diaphragm valve that, while capable of handling high pressure, achieves compactness and low torque. The "manual valve" features a smooth operational feel and employs a large window and easily visible OPEN/CLOSE indicators to allow for immediate confirmation of the open/closed status. The "automatic valve" enhances the rigidity of the connection between the body and actuator, improving reliability, and incorporates a patented wedge-type amplification mechanism, resulting in a compact and highly durable actuator. 【Features】 <Manual Valve> ■ Adoption of a large wheel handle for a smooth operational feel ■ Large window and easily visible OPEN/CLOSE indicators for immediate confirmation of the open/closed status *For more details, please refer to the PDF document or feel free to contact us.

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High Purity Gas Diaphragm Valve "VLD Series"

Minimization and simplification of drive components achieved! A diaphragm valve that supports high-purity gases for semiconductors and pursues particle performance to the limit.

The "VLD Series" is a diaphragm valve that is based on the "KD Series," designed to pursue ease of use and simplicity. While maintaining the basic performance, materials, and cleanliness, we have reviewed the components, changed the processing methods, and reduced the number of parts to achieve safety and low prices. With the highest level of manufacturing environment and internal polishing treatment, we have addressed high-purity gases for semiconductors and pursued particle performance to the extreme. 【Features】 ■ Minimization and simplification of drive components ■ Achieving safety and low prices ■ Cleaning and inspection processes are equivalent to the conventional model ■ Reliability and durability performance remain unchanged ■ Addressing high-purity gases for semiconductors and pursuing particle performance to the extreme *KITZ SCT offers various proposals for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

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High-purity gas diaphragm valve "Two-Step Valve"

This is a revolutionary composite valve that enables flow adjustment and two-stage control of fully open/fully closed with a single unit.

The "Two-Step Valve" is a revolutionary composite valve that enables manual flow adjustment and two-stage control of fully open/fully closed using an air actuator, all in one unit. By controlling the fluid with a diaphragm instead of a needle, it achieves particle-free and speedy gas supply. This eliminates the need for bypass piping and control equipment in conventional systems, allowing for significant cost reduction and space-saving. 【Features】 ■ Enables manual flow adjustment and two-stage control of fully open/fully closed with an air actuator in one unit ■ Achieves particle-free and speedy gas supply ■ Eliminates the need for bypass piping and control equipment in conventional systems ■ Allows for significant cost reduction and space-saving ■ Suitable Cv values can be set as needed according to the intended use *KITZ SCT offers various proposals for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

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